Fabrication and Design of Resonant Microdevices Behraad Bahreyni

ISBN: 9781282252981

Published: October 1st 2008

ebook

181 pages


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Fabrication and Design of Resonant Microdevices  by  Behraad Bahreyni

Fabrication and Design of Resonant Microdevices by Behraad Bahreyni
October 1st 2008 | ebook | PDF, EPUB, FB2, DjVu, audiobook, mp3, ZIP | 181 pages | ISBN: 9781282252981 | 9.61 Mb

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After aMoreThis book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief



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